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https://doi.org/10.37358/Rev.Chim.1949

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Revista de Chimie (Rev. Chim.), Year 2011, Volume 62, Issue 5,





PAULA PRIOTEASA, AURORA PETICA, MARIUS POPA, CRISTINEL ILIE, TEODOR VISAN
Electrochemical Deposition of Nickel for Micro-mechanical Systems

Abstract:

Parts of micro-mechanical systems were obtained electrochemically from nickel sulfamate-based electrolyte on silicon wafer substrate using LIGA lithography. A selection of optimum fabrication sequences and operating conditions was also done. The deposited nickel layer showed good appearance especially for relatively thin nickel layers (up to 80-90mm), characterized by uniformity, fine-grained and brightness. In the cases of thicker layer (more than 90-100mm) dull and rough deposit, as well as dendrites are noticed on the edge zone of the substrate mold. The structure, texture, crystallite size and Vickers microhardness were evidenced and measured by optical and SEM microscopy, XRD diffraction spectroscopy and microhardness tests. Keywords: micro-mechanical systems, nickel electrodeposition, sulfamate bath,surface characterization


Issue: 2011, Volume 62, Issue 5
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